Nanophotonics Fabrication

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6 Credits

EECE 584

Design, fabricate, and test a photonic integrated circuit (PIC) using silicon-on-insulator (SOI) technology. Modelling and design of optical components.

Course Outline

  • This is a 6 credit graduate full year course.
  • This can be integrated with your research, or as a stand-alone learning opportunity.
  • Several weeks of case-study instruction.
  • Design and modelling: done on your own, with access to software tools provided. On-line on-line tutorials & on-line discussions, design feedback (Fall).
  • Testing & model validation: at UBC, CMC, or your own lab.

Technology Description

  • Silicon-on-insulator, 220nm top Si film, 2000nm buried oxide (BOX)
  • 193nm deep UV lithography, enabling features down to ~120 nm
  • Supports design and fabrication of a range of PICs including:
    •    photonic crystals
    •    waveguides (photonic crystal or ridge)
    •    gratings for fiber coupling
    •    multiplexers (diffraction or arrayed waveguide)
    •    ring resonators
    •    filters
  • Target applications include optical communications, sensors, and biomedical devices

 


 

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