Micro/Nanofabrication and Instrumentation Laboratory

More Information

UBC Calendar

Course Page

3 Credits

ELEC 463

Microfabrication methods and nanofabrication techniques. Imaging and characterization of micro and nanostructures.  [2-4-0]

Course Objective

  • Fabricate and measure a silicon photonic circuit, using methods similar to what is used for CMOS electronics

  • design an optical circuit using an open-source layout tool, optical modelling TCAD software (Technology Computer Aided Design), and Matlab

  • fabricate it using a state-of-the-art electron beam lithographyconduct post-processing (thin film deposition, optical lithography, metal deposition)

  • perform characterization (AFM, SEM, optical, electronic)

     

Course Outline
This is a hands-on opportunity to develop skills in design, fabrication and experimentation relating to CMOS manufacturing in the context of silicon photonics applications.  In this course, students will design an optical circuit using commercial EDA tools (Electronic Design Automation) and optical modelling TCAD Software (Technology Computer Aided Design), have it fabricated via electron beam lithography, and conduct post-processing (thin film deposition, optical lithography, metal deposition) and characterization (AFM, SEM, optical, electronic) in the AMPEL Nanofabrication Facility and optoelectronics labs.

Target Audience
students with an interest in CMOS, electronics, and/or optical design.

Course Topics

Introduction to micro/nano devices, fabrication and characterization

  • Lithography
  • Thin film deposition
  • Etching
  • CMOS manufacturing
  • Silicon photonics
  • Electron microscopy
  • Scanning probe microscopy

Pre-requisites
No formal pre-requisites; basic math, programming and computer skills assumed

 

 

Professor: 

a place of mind, The University of British Columbia

Electrical and Computer Engineering
2332 Main Mall
Vancouver, BC Canada V6T 1Z4
Tel +1.604.822.2872
Fax +1.604.822.5949
Email:

Emergency Procedures | Accessibility | Contact UBC | © Copyright 2018 The University of British Columbia