ELEC 462

Sensors and Actuators in Microsystems

The mechanisms, design, fabrication, and testing of microsensors, actuators, and microelectromechanical systems (MEMS).

3 credits

Course Objectives

On the successful completion of this course, the student will be able to:

  • understand basic microfabrication technology
  • design a fabrication process to achieve desired mechanical and electrical structures
  • understand principles of microsensors and microactuators
  • derive sensor and actuator characteristics
  • design microsensors and microactuators for specific tasks

Course Topics

  • MEMS
  • Microfabrication
  • Piezoresistive sensors
  • Thermal principles and actuation
  • Electrostatics
  • Microfluidics

More Information

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