Sensors and Actuators in Microsystems
The mechanisms, design, fabrication, and testing of microsensors, actuators, and microelectromechanical systems (MEMS).
3 credits
Course Objectives
On the successful completion of this course, the student will be able to:
- understand basic microfabrication technology
- design a fabrication process to achieve desired mechanical and electrical structures
- understand principles of microsensors and microactuators
- derive sensor and actuator characteristics
- design microsensors and microactuators for specific tasks
Course Topics
- MEMS
- Microfabrication
- Piezoresistive sensors
- Thermal principles and actuation
- Electrostatics
- Microfluidics
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