Sensors and Actuators in Microsystems
The mechanisms, design, fabrication, and testing of microsensors, actuators, and microelectromechanical systems (MEMS).
3 credits
Course Objectives
On the successful completion of this course, the student will be able to:
- understand basic microfabrication technology;
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design a fabrication process to achieve desired mechanical and electrical structures;
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apply basic principles of microsensors and microactuators and derive sensor and actuator characteristics.
Course Topics
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Microfabrication technology
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Piezoresistive sensors
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Thermal microdevices
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Electrostatic microdevices
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Piezoelectric microdevices
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Optical microdevices
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Microfluidics