ELEC 462

Sensors and Actuators in Microsystems

The mechanisms, design, fabrication, and testing of microsensors, actuators, and microelectromechanical systems (MEMS).

3 credits

Course Objectives

On the successful completion of this course, the student will be able to:

  • understand basic microfabrication technology;
  • design a fabrication process to achieve desired mechanical and electrical structures;
  • apply basic principles of microsensors and microactuators and derive sensor and actuator characteristics.

Course Topics

  • Microfabrication technology
  • Piezoresistive sensors
  • Thermal microdevices
  • Electrostatic microdevices
  • Piezoelectric microdevices
  • Optical microdevices
  • Microfluidics

More Information

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