Babak Assadsangabi, Xing Chen, Dan Brox and Prof. Kenichi Takahata received the Best Student Paper Award at IEEE SENSORS Conference for their submission titled, Microfabrication of Capacitive Pressure Sensors Using Ferrofluid Sacrificial Layer.
The team concluded that ferrofluid is a practical sacrificial layer material in fabricating capacitive pressure sensors. The sensor fabrication process is simple and rapid, with no optical, chemocal, or thermal steps involved. By fabricating a pressure sensor with the injection of ferrofluid, manufacturers could increase the efficiency, save time and decrease the production cost. The fabrication approach is applicable to a vairety of MEMEs sensors that use suspended sturcutres.
IEEE SENSORS Conference annually gathers professionals in the general field of sensors in exchange of information and new technologies. It is an important forum for presenting and discussing latest research and development among professionals. The Best Student Paper Award is given to Student Members of the IEEE in recognition of excellence in their conference paper.
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